BECKER真空泵U3.6SA
|
U-油旋片真空泵
|
|
技术参数
50Hz
|
U
|
|
U3.6SA
|
U3.10SA
|
U4.20
|
U3.25SA
|
U3.40SA
|
U4.70SA/K
|
U4.70F/K
|
U4.100SA/K
|
U4.100F/K
|
U4.165SA/K
|
|
抽气速度m3/h
|
6.5
|
12
|
18
|
25
|
42
|
70
|
70
|
100
|
100
|
160
|
|
极限真空mbar
|
3
|
3
|
1
|
3
|
3
|
3
|
0.5
|
3
|
0.5
|
3
|
|
电机功率KW
|
0.25
|
0.37
|
0.55
|
0.75
|
1.1
|
1.5
|
1.5
|
2.2
|
2.2
|
3.0
|
|
技术参数
50Hz
|
U
|
|
U4.165F/K
|
U4.190SA/K
|
U4.190F/K
|
U4.250SA/K
|
U4.250F/K
|
U4.400SA/K
|
U4.400F/K
|
U4.630SA/K
|
U4.630F/K
|
|
抽气速度m3/h
|
4
|
184
|
184
|
240
|
240
|
400
|
400
|
630
|
630
|
|
极限真空mbar
|
0.5
|
3
|
0.5
|
3
|
0.5
|
3
|
0.5
|
3
|
0.5
|
|
电机功率KW
|
3.0
|
4.0
|
4.0
|
5.5
|
5.5
|
11.0
|
11.0
|
15.0
|
15.0
|
|
|
VT/KVT/VTLF-无油旋片真空泵
|
|
技术参数
50Hz
|
VT/KVT/VTLF
|
|
VT4.4
|
VT4.8
|
VT4.10
|
VT4.16
|
VT4.25
|
VT4.40
|
KVT3.60
|
KVT3.80
|
KVT3.100
|
KT3.140
|
|
抽气速度m3/h
|
4
|
8
|
10
|
16
|
25
|
40
|
55
|
67
|
98
|
132
|
|
极限真空mbar
|
150
|
150
|
150
|
150
|
150
|
150
|
100
|
100
|
100
|
100
|
|
电机功率KW
|
0.18
|
0.35
|
0.37
|
0.55
|
0.75
|
1.25
|
1.5
|
2.2
|
3.0
|
4.0
|
|
技术参数
50Hz
|
VT/KVT/VTLF
|
|
VTLF250
|
VTLF360
|
VTLF500
|
|
|
|
|
|
|
|
|
抽气速度m3/h
|
250
|
360
|
500
|
|
|
|
|
|
|
|
|
极限真空mbar
|
200
|
200
|
200
|
|
|
|
|
|
|
|
|
电机功率KW
|
5.5
|
11.0
|
15.0
|
|
|
|
|
|
|
|
|
|
T/DVT/DVTLF-无油真空/压力复合泵
|
|
技术参数
50Hz
|
T/DVT/DVTLF
|
|
T4.16DS
|
T4.25DSK
|
T4.40DSK
|
DVT3.60
|
DVT3.80
|
DVT3.100
|
DVT3.140
|
DVTLF250
|
DVTLF250
|
|
抽气速度m3/h
|
16
|
25
|
40
|
58
|
70
|
103
|
137
|
250
|
|
|
最大正压bar
|
0.6
|
0.6
|
0.6
|
0.6
|
0.6
|
0.6
|
0.6
|
0.6
|
|
|
最大负压bar
|
0.6
|
0.6
|
0.6
|
0.6
|
0.6
|
0.6
|
0.6
|
0.6
|
|
|
电机功率KW
|
0.55
|
1.1
|
1.85
|
3
|
3
|
5.5
|
7.5
|
7.5
|
|
|
|
|
|
主要型号有：U3.6SA、U3.10SA、U4.20、U3.25SA、U3.40SA、U4.70SA/K、U4.100SA/K、U4.100F/K、U4.165SA/K、U4.190SA/K、U4.190F/K、U4.250SA/K、U4.250F/K、U4.400SA/K、U4.400F/K、U4.630SA/K、U4.630F/K、VT4.4、VT4.8、VT4.10、VT4.16、VT4.25、VT4.40、
HORIBA轴承 1000110646 6011.c3
HORIBA电脑板 7000543301
HORIBA控制器 1000073620
HORIBA储存卡 1000032460
HORIBA冷却室 1300012151 WT190/WT2-380
HORIBA圆形密封 1000004523 VI-RSTV390x3
HORIBA O型密封 1000006692 VI-RSTV378x3
HORIBA圆形密封 1000004522 222x3FPM80
HORIBA轴承座 1000009609 fixed besring socket WT190/WT2-380
HORIBA SIH4质量流量计 SEC-N112MGM(SIH4，3SLM) VALVE:C TREAT ;GAS:N2 MR.MG-06;FLOWRATE:10SLM通信控制 PECVD
HORIBA NH3质量流量计 SEC-N112MGM(NH3，10SLM) VALVE:C TREAT ;GAS:N2 MR.MG-07;FLOWRATE:30SLM（通信控制）PECVD
HORIBA NH3质量流量计 SEC-N112MGM(NH3，10SLM) VALVE:C TREAT ;GAS:N2 MR.MG-07;FLOWRATE:30SLM（通信控制）PECVD